TCJ's name 
Current Research 


Topics   Characterization Methods   Execuation Date  
Optical and Structure Properties of Hydrogenated amorphous SiGe   UV-NIR Spectrometry, FTIR, Thermal Effusion, etc.   5/1996~1998.  
Silicide Formation Kinetics - CoSi2 and NiSi   X-ray, TEM, Curvature Measurement, etc.   8/1997~present.  
Interconnect Reliability - Stresses of Cu Alloy during Thermal Cycling   X-ray, TEM, Curvature Measurement, etc.   8/1996~present.  
Metal induced Amorphous Si to Poly-Si transition    X-ray, TEM, Curvature Measurement, etc.   8/1997~present.   



Lab Equipments 
Curvature Measurement System 

Curvature Measurement System Optical parts of the system Vacuum Parts of the system